Martyn John COOGANS

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection method and apparatus, and corresponding lithographic app...
- Patent number 10,295,913
- Issue date May 21, 2019
- ASML Netherlands B.V.
- Scott Anderson Middlebrooks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 9,594,310
- Issue date Mar 14, 2017
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 9,594,311
- Issue date Mar 14, 2017
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for measuring a property of a subst...
- Patent number 9,235,141
- Issue date Jan 12, 2016
- ASML Netherlands B.V.
- Maurits Van Der Schaar
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining an overlay error
- Patent number 8,908,147
- Issue date Dec 9, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Apparatus and method of measuring a property of a substrate
- Patent number 8,786,825
- Issue date Jul 22, 2014
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20140333922
- Publication date Nov 13, 2014
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20140327908
- Publication date Nov 6, 2014
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Apparatus, and Corresponding Lithographic App...
- Publication number 20130135600
- Publication date May 30, 2013
- ASML NETHERLANDS B.V.
- Scott Anderson MIDDLEBROOKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Apparatus and Method, Lithographic Apparatus and Lithogr...
- Publication number 20120033193
- Publication date Feb 9, 2012
- ASML NETHERLANDS B.V.
- Maurits VAN DER SCHAAR
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Determining an Overlay Error
- Publication number 20120013881
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
Apparatus and Method of Measuring a Property of a Substrate
- Publication number 20110102753
- Publication date May 5, 2011
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING

Martyn John COOGANS

Person

Patents Grantslast 30 patents

Inspection method and apparatus, and corresponding lithographic app...

Inspection method and apparatus, lithographic apparatus, lithograph...

Inspection method and apparatus, lithographic apparatus, lithograph...

Inspection apparatus and method for measuring a property of a subst...

Method and apparatus for determining an overlay error

Apparatus and method of measuring a property of a substrate

Patents Applicationslast 30 patents

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Inspection Method and Apparatus, and Corresponding Lithographic App...

Inspection Apparatus and Method, Lithographic Apparatus and Lithogr...

Method and Apparatus for Determining an Overlay Error

Apparatus and Method of Measuring a Property of a Substrate