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Maruti Shanbhag
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Bangalore, IN
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last 30 patents
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Patent Grant
Flexible hybrid defect classification for semiconductor manufacturing
Patent number
7,142,992
Issue date
Nov 28, 2006
KLA-Tencor Technologies Corp.
Patrick Huet
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
FLEXIBLE HYBRID DEFECT CLASSIFICATION FOR SEMICONDUCTOR MANUFACTURING
Publication number
20060265145
Publication date
Nov 23, 2006
Patrick Huet
G06 - COMPUTING CALCULATING COUNTING