Marwene Nefzi

Person

Ulm, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,703,770
- Issue date Jul 18, 2023
- Carl Zeiss SMT GmbH
- Eylem Bektas Knauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,526,089
- Issue date Dec 13, 2022
- Carl Zeiss SMT GmbH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,415,895
- Issue date Aug 16, 2022
- Carl Zeiss SMT GmbH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element for the beam guidance of imaging light in projectio...
- Patent number 10,989,897
- Issue date Apr 27, 2021
- Carl Zeiss SMT GmbH
- Stefan Hembacher
- G02 - OPTICS
Information Patent Grant
Optical arrangement, in particular lithography system
- Patent number 10,809,636
- Issue date Oct 20, 2020
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement, in particular lithography system, with a trans...
- Patent number 10,761,436
- Issue date Sep 1, 2020
- Carl Zeiss SMT GmbH
- Ralf Zweering
- G02 - OPTICS
Information Patent Grant
Optical imaging arrangement with a piezoelectric device
- Patent number 10,416,570
- Issue date Sep 17, 2019
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moveably mounted component of projection exposure system, as well a...
- Patent number 10,095,126
- Issue date Oct 9, 2018
- Carl Zeiss SMT GmbH
- Jens Prochnau
- G02 - OPTICS
Information Patent Grant
Arrangement and lithography apparatus with arrangement
- Patent number 9,632,421
- Issue date Apr 25, 2017
- Carl Zeiss SMT GmbH
- Marwene Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT, PROJECTION OPTICAL UNIT AND PROJECTION EXPOSURE AP...
- Publication number 20240176249
- Publication date May 30, 2024
- Carl Zeiss SMT GMBH
- Marwene Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR OPERATING AN OPTICAL SYSTEM
- Publication number 20240160113
- Publication date May 16, 2024
- Carl Zeiss SMT GMBH
- Julian Zips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND PROJECTION EXPOSURE APPARATUS
- Publication number 20230408934
- Publication date Dec 21, 2023
- Carl Zeiss SMT GMBH
- Marwene Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT, OPTICAL ARRANGEMENT, AND METHOD FOR MANUFACTURING...
- Publication number 20230185080
- Publication date Jun 15, 2023
- Carl Zeiss SMT GMBH
- Marwene Nefzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DAMPING ARRANGEMENT FOR VIBRATION DAMPING OF AN ELEMENT IN AN OPTIC...
- Publication number 20230104921
- Publication date Apr 6, 2023
- Carl Zeiss SMT GMBH
- Marwene Nefzi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD FOR MAINTAINING A PROJECTION EXPOSURE APPARATUS, SERVICE MOD...
- Publication number 20230072843
- Publication date Mar 9, 2023
- Carl Zeiss SMT GMBH
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405358
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Eylem Bektas Knauf
- G02 - OPTICS
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405543
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405542
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Marwène Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405359
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Eylem Bektas Knauf
- G02 - OPTICS
Information Patent Application
OPTICAL ELMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION...
- Publication number 20200333557
- Publication date Oct 22, 2020
- Carl Zeiss SMT GMBH
- Stefan Hembacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM
- Publication number 20190339626
- Publication date Nov 7, 2019
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM, WITH A TRANS...
- Publication number 20190339625
- Publication date Nov 7, 2019
- Carl Zeiss SMT GMBH
- Ralf Zweering
- G02 - OPTICS
Information Patent Application
OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE
- Publication number 20190094705
- Publication date Mar 28, 2019
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
MOVEABLY MOUNTED COMPONENT OF PROJECTION EXPOSURE SYSTEM, AS WELL A...
- Publication number 20170357164
- Publication date Dec 14, 2017
- Carl Zeiss SMT GMBH
- Jens Prochnau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT AND LITHOGRAPHY APPARATUS WITH ARRANGEMENT
- Publication number 20160216611
- Publication date Jul 28, 2016
- Carl Zeiss SMT GMBH
- Marwene Nefzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marwene Nefzi

Person

Patents Grantslast 30 patents

Compensation of creep effects in an imaging device

Compensation of creep effects in an imaging device

Compensation of creep effects in an imaging device

Optical element for the beam guidance of imaging light in projectio...

Optical arrangement, in particular lithography system

Optical arrangement, in particular lithography system, with a trans...

Optical imaging arrangement with a piezoelectric device

Moveably mounted component of projection exposure system, as well a...

Arrangement and lithography apparatus with arrangement

Patents Applicationslast 30 patents

OPTICAL ELEMENT, PROJECTION OPTICAL UNIT AND PROJECTION EXPOSURE AP...

METHOD FOR OPERATING AN OPTICAL SYSTEM

SYSTEM AND PROJECTION EXPOSURE APPARATUS

OPTICAL ELEMENT, OPTICAL ARRANGEMENT, AND METHOD FOR MANUFACTURING...

DAMPING ARRANGEMENT FOR VIBRATION DAMPING OF AN ELEMENT IN AN OPTIC...

METHOD FOR MAINTAINING A PROJECTION EXPOSURE APPARATUS, SERVICE MOD...

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

OPTICAL ELMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION...

OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM

OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM, WITH A TRANS...

OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE

MOVEABLY MOUNTED COMPONENT OF PROJECTION EXPOSURE SYSTEM, AS WELL A...

ARRANGEMENT AND LITHOGRAPHY APPARATUS WITH ARRANGEMENT