Mary Anne Plano

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Selective refractory metal and nitride capping
- Patent number 7,157,798
- Issue date Jan 2, 2007
- Novellus Systems, Inc.
- James A. Fair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective refractory metal and nitride capping
- Patent number 6,844,258
- Issue date Jan 18, 2005
- Novellus Systems, Inc.
- James A. Fair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of minimizing reactive ion etch damage of organic insulating...
- Patent number 6,265,320
- Issue date Jul 24, 2001
- Novellus Systems, Inc.
- Jianou Shi
- H01 - BASIC ELECTRIC ELEMENTS