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Mary Veneklasen
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Castro Valley, CA, US
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last 30 patents
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Patent Application
Technique for writing with a raster scanned beam
Publication number
20030183782
Publication date
Oct 2, 2003
Lee H. Veneklasen
B82 - NANO-TECHNOLOGY
Information
Patent Application
Real-time prediction of and correction of proximity resist heating...
Publication number
20020148978
Publication date
Oct 17, 2002
APPLIED MATERIALS, INC.
Robert Innes
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam apparatus having traversing circuit boards
Publication number
20020134912
Publication date
Sep 26, 2002
APPLIED MATERIALS, INC.
Lee Veneklasen
B82 - NANO-TECHNOLOGY
Information
Patent Application
Raster shaped beam, electron beam exposure strategy using a two dim...
Publication number
20020104970
Publication date
Aug 8, 2002
Stacey J. Winter
B82 - NANO-TECHNOLOGY