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Masaaki Aoto
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Kumamoto, JP
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last 30 patents
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Patent Grant
Thin-film structure and method for manufacturing the same, and acce...
Patent number
7,371,600
Issue date
May 13, 2008
Mitsubishi Denki Kabushiki Kaisha
Kiyoshi Ishibashi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Thin-film structure and method for manufacturing the same, and acce...
Publication number
20030180981
Publication date
Sep 25, 2003
Kiyoshi Ishibashi
B81 - MICRO-STRUCTURAL TECHNOLOGY