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Masaaki Aoyama
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Kasugai-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Dry etching with reduced damage to MOS device
Patent number
6,884,670
Issue date
Apr 26, 2005
Fujitsu Limited
Koichi Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a gate insulation film resistant to die...
Patent number
6,559,485
Issue date
May 6, 2003
Fujitsu Limited
Masaaki Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching with reduced damage to MOS device
Patent number
6,376,388
Issue date
Apr 23, 2002
Fujitsu Limited
Koichi Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method including ashing process
Patent number
6,044,850
Issue date
Apr 4, 2000
Fujitsu Limited
Soichiro Ozawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Dry etching with reduced damage to MOS device
Publication number
20020094625
Publication date
Jul 18, 2002
FUJITSU LIMITED
Koichi Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING A GATE INSULATION FILM RESISTANT TO DIE...
Publication number
20020000579
Publication date
Jan 3, 2002
FUJITSU LIMITED
Masaaki Aoyama
H01 - BASIC ELECTRIC ELEMENTS