Masaaki Aoyama

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus having independent chambers and methods of makin...
- Patent number 6,707,528
- Issue date Mar 16, 2004
- Nikon Corporation
- Masaaki Aoyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus for coating photoresist on a substra...
- Patent number 6,697,145
- Issue date Feb 24, 2004
- Nikon Corporation
- Masaaki Aoyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,559,582
- Issue date Sep 24, 1996
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding apparatus for holding an article such as a semiconductor wafer
- Patent number 5,324,012
- Issue date Jun 28, 1994
- Nikon Corporation
- Masaaki Aoyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Device for positioning circular semiconductor wafers
- Patent number 5,194,743
- Issue date Mar 16, 1993
- Nikon Corporation
- Masaaki Aoyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for processing and conveying substrate
- Patent number 4,900,939
- Issue date Feb 13, 1990
- Nikon Corporation
- Masaaki Aoyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY