Masaaki MIYAGAWA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature measurement sensor, temperature measurement system, and...
- Patent number 11,841,278
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Tong Wu
- G01 - MEASURING TESTING
Information Patent Grant
Temperature measurement substrate and temperature measurement system
- Patent number 11,035,741
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Tadashi Mitsunari
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE MEASUREMENT SENSOR, TEMPERATURE MEASUREMENT SYSTEM, AND...
- Publication number 20200408613
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Tong WU
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASUREMENT SUBSTRATE AND TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20190120703
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- G01 - MEASURING TESTING