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Masaaki Miyajima
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Kasugai, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Preparing data for hybrid exposure using both electron beam exposur...
Patent number
8,141,009
Issue date
Mar 20, 2012
Fujitsu Semiconductor Limited
Masaaki Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Variable rectangle-type electron beam exposure apparatus and patter...
Patent number
7,205,557
Issue date
Apr 17, 2007
Fujitsu Limited
Masaaki Miyajima
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and apparatus for generating semiconductor exposure data
Patent number
6,275,604
Issue date
Aug 14, 2001
Fujitsu Limited
Masaaki Miyajima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for generating exposure data of semiconductor...
Patent number
5,995,878
Issue date
Nov 30, 1999
Fujitsu Limited
Masaaki Miyajima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Block exposure of semiconductor wafer
Patent number
5,984,505
Issue date
Nov 16, 1999
Fujitsu Limited
Masaaki Miyajima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Block exposure of semiconductor wafer
Patent number
5,917,579
Issue date
Jun 29, 1999
Fujitsu Limited
Masaaki Miyajima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern judging method, mask producing method, and method of dividi...
Patent number
5,537,487
Issue date
Jul 16, 1996
Fujitsu Limited
Masaaki Miyajima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern data processing method
Patent number
5,046,012
Issue date
Sep 3, 1991
Fujitsu Limited
Kazumasa Morishita
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PREPARING DATA FOR EXPOSURE AND METHOD FOR MANUFACTURING...
Publication number
20090239160
Publication date
Sep 24, 2009
Fujitsu Microelectronics Limited
Masaaki MIYAJIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Variable rectangle-type electron beam exposure apparatus and patter...
Publication number
20060169925
Publication date
Aug 3, 2006
FUJITSU LIMITED
Masaaki Miyajima
B82 - NANO-TECHNOLOGY
Information
Patent Application
Variable rectangle-type electron beam exposure apparatus and patter...
Publication number
20060076513
Publication date
Apr 13, 2006
FUJITSU LIMITED
Yutaka Nakamura
B82 - NANO-TECHNOLOGY