Masaaki Murakami

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Kumamoto-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Resist processing method and apparatus
- Patent number 5,779,796
- Issue date Jul 14, 1998
- Tokyo Electron Limited
- Takayuki Tomoeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,759,614
- Issue date Jun 2, 1998
- Tokyo Electron Limited
- Takayuki Tomoeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,626,913
- Issue date May 6, 1997
- Tokyo Electron Limited
- Takayuki Tomoeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus and method
- Patent number 5,580,607
- Issue date Dec 3, 1996
- Tokyo Electron Limited
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for applying process solution to substrates
- Patent number 5,416,047
- Issue date May 16, 1995
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for heat-processing semiconductor device and apparatus for t...
- Patent number 5,151,871
- Issue date Sep 29, 1992
- Tokyo Electron Limited
- Kimiharu Matsumura
- G05 - CONTROLLING REGULATING