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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern measurement device and pattern measurement method
Patent number
12,174,551
Issue date
Dec 24, 2024
Hitachi High-Technologies Corporation
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern measurement device and pattern measurement method
Patent number
11,353,798
Issue date
Jun 7, 2022
Hitachi High-Technologies Corporation
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for scanning a sample using a charged...
Patent number
8,421,010
Issue date
Apr 16, 2013
Hitachi High-Technologies Corporation
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus for inspecting patterns of substrate
Patent number
8,134,697
Issue date
Mar 13, 2012
Hitachi High-Technologies Corporation
Koichi Hayakawa
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus for inspecting patterns of a substrate
Patent number
8,036,447
Issue date
Oct 11, 2011
Hitachi High-Technologies Corporation
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Circuit pattern inspection apparatus
Patent number
7,696,487
Issue date
Apr 13, 2010
Hitachi High-Technologies Corporation
Koichi Hayakawa
G01 - MEASURING TESTING
Information
Patent Grant
Circuit-pattern inspection apparatus
Patent number
7,532,328
Issue date
May 12, 2009
Hitachi High-Technologies Corporation
Yasuhiko Nara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Circuit-pattern inspection apparatus
Patent number
7,292,327
Issue date
Nov 6, 2007
Hitachi High-Technologies Corporation
Yasuhiko Nara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus for circuit pattern
Patent number
7,223,975
Issue date
May 29, 2007
Hitachi, Ltd.
Yasuhiko Nara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Pattern Measurement Device and Pattern Measurement Method
Publication number
20220260930
Publication date
Aug 18, 2022
HITACHI HIGH-TECH CORPORATION
Takuma Yamamoto
G01 - MEASURING TESTING
Information
Patent Application
Pattern Measurement Device and Pattern Measurement Method
Publication number
20200278615
Publication date
Sep 3, 2020
Hitachi High-Technologies Corporation
Takuma YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUIT PATTERN INSPECTING DEVICE AND INSPECTING METHOD THEREOF
Publication number
20130271595
Publication date
Oct 17, 2013
Hitachi High-Technologies Corporation
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
CIRCUIT PATTERN INSPECTION APPARATUS AND CIRCUIT PATTERN INSPECTION...
Publication number
20130082177
Publication date
Apr 4, 2013
Hitachi High-Technologies Corporation
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTING APPARATUS AND PATTERN INSPECTING METHOD
Publication number
20110298915
Publication date
Dec 8, 2011
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20110163230
Publication date
Jul 7, 2011
Hitachi High-Technologies Corporation
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS FOR CIRCUIT PATTERN
Publication number
20100019148
Publication date
Jan 28, 2010
Hitachi High-Technologies Corporation
Yasuhiko Nara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS FOR INSPECTING PATTERNS OF A SUBSTRATE
Publication number
20100008564
Publication date
Jan 14, 2010
Hitachi High-Technologies Corporation
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20090261251
Publication date
Oct 22, 2009
Hitachi High-Technologies Corporation
Koichi HAYAKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS FOR INSPECTING PATTERNS OF SUBSTRATE
Publication number
20090208091
Publication date
Aug 20, 2009
HITACHI HIGH-TECHNOLOIES CORPORATION
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Circuit-pattern inspection apparatus
Publication number
20080174772
Publication date
Jul 24, 2008
Hitachi, Ltd
Yasuhiko Nara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Inspection apparatus for circuit pattern
Publication number
20070284526
Publication date
Dec 13, 2007
Hitachi High-Technologies Corporation
Yasuhiko Nara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Circuit pattern inspection apparatus
Publication number
20070114397
Publication date
May 24, 2007
Koichi Hayakawa
G01 - MEASURING TESTING
Information
Patent Application
Inspection apparatus for inspecting patterns of a substrate
Publication number
20060171593
Publication date
Aug 3, 2006
Hitachi High-Technologies Corporation
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Circuit-pattern inspection apparatus
Publication number
20050043903
Publication date
Feb 24, 2005
Yasuhiko Nara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Inspection apparatus for circuit pattern
Publication number
20040227079
Publication date
Nov 18, 2004
Hitachi High-Technologies Corporation
Yasuhiko Nara
H01 - BASIC ELECTRIC ELEMENTS