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Masaaki Osato
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Tokyo, JP
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last 30 patents
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Patent Grant
Method and apparatus for treating gas containing flourine-containin...
Patent number
7,955,578
Issue date
Jun 7, 2011
Ebara Corporation
Yoichi Mori
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
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Patent Application
Impurity removing apparatus and method of operating the same
Publication number
20100086459
Publication date
Apr 8, 2010
EBARA CORPORATION
Hiroshi Ikeda
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Application
Method and Apparatus for Treating Gas Containing Flourine-Containin...
Publication number
20070264188
Publication date
Nov 15, 2007
Ebara Corporation
Yoichi Mori
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL