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MASAAKI TSUCHIHASHI
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TOKYO, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer processing apparatus
Patent number
6,416,618
Issue date
Jul 9, 2002
Mitsubishi Denki Kabushiki Kaisha
Masaaki Tsuchihashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus capable of reliably, electrostatically...
Patent number
6,273,023
Issue date
Aug 14, 2001
Mitsubishi Denki Kabushiki Kaisha
Masaaki Tsuchihashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generating apparatus with multiple microwave introducing means
Patent number
6,109,208
Issue date
Aug 29, 2000
Mitsubishi Denki Kabushiki Kaisha
Masaaki Tsuchihashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically enhanced microwave plasma generating apparatus
Patent number
6,054,016
Issue date
Apr 25, 2000
Mitsubishi Denki Kabushiki Kaisha
Mutumi Tuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing device and method of removing particles...
Patent number
6,024,105
Issue date
Feb 15, 2000
Mitsubishi Denki Kabushiki Kaisha
Minoru Hanazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
WAFER PROCESSING APPARATUS
Publication number
20020002950
Publication date
Jan 10, 2002
MASAAKI TSUCHIHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...