MASAAKI TSUCHIHASHI

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TOKYO, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus
- Patent number 6,416,618
- Issue date Jul 9, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus capable of reliably, electrostatically...
- Patent number 6,273,023
- Issue date Aug 14, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating apparatus with multiple microwave introducing means
- Patent number 6,109,208
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced microwave plasma generating apparatus
- Patent number 6,054,016
- Issue date Apr 25, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mutumi Tuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing device and method of removing particles...
- Patent number 6,024,105
- Issue date Feb 15, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20020002950
- Publication date Jan 10, 2002
- MASAAKI TSUCHIHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...