Masaaki Yoshida

Follow

Person

Kumamoto-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Interlock apparatus for a transfer machine
- Patent number 6,336,054
- Issue date Jan 1, 2002
- Tokyo Electron Limited
- Yoshiharu Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning unit and cleaning method
- Patent number 6,261,378
- Issue date Jul 17, 2001
- Tokyo Electron Limited
- Hiroshi Hashimoto
- B08 - CLEANING
Information Patent Grant
Heat processing device with hot plate and associated reflector
- Patent number 6,087,632
- Issue date Jul 11, 2000
- Tokyo Electron Limited
- Kengo Mizosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for cleaning substrate surface by use of Ozone
- Patent number 5,998,766
- Issue date Dec 7, 1999
- Tokyo Electron Limited
- Kengo Mizosaki
- B08 - CLEANING
Information Patent Grant
Interlock apparatus for a transfer machine
- Patent number 5,963,449
- Issue date Oct 5, 1999
- Tokyo Electron Limited
- Yoshiharu Ota
- H01 - BASIC ELECTRIC ELEMENTS