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Masafumi Inoue
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Fujisawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device
Patent number
11,816,050
Issue date
Nov 14, 2023
Renesas Electronics Corporation
Koki Higuchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Failure detection apparatus for substrate processing apparatus, and...
Patent number
10,317,890
Issue date
Jun 11, 2019
Ebara Corporation
Mitsunori Sugiyama
G05 - CONTROLLING REGULATING
Information
Patent Grant
Unit control panel, substrate transfer test method, and substrate p...
Patent number
9,849,488
Issue date
Dec 26, 2017
Ebara Corporation
Shunsuke Matsuzawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and program thereof
Patent number
8,206,197
Issue date
Jun 26, 2012
Ebara Corporation
Hidetaka Nakao
B24 - GRINDING POLISHING
Information
Patent Grant
Data processing system having a data transfer unit for converting a...
Patent number
7,464,210
Issue date
Dec 9, 2008
Renesas Technology Corp.
Masafumi Inoue
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polishing apparatus
Patent number
7,270,594
Issue date
Sep 18, 2007
Ebara Corporation
Takuji Hayama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
7,156,719
Issue date
Jan 2, 2007
Ebara Corporation
Takuji Hayama
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
6,409,576
Issue date
Jun 25, 2002
Ebara Corporation
Syozo Oguri
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20210390067
Publication date
Dec 16, 2021
RENESAS ELECTRONICS CORPORATION
Koki HIGUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150290766
Publication date
Oct 15, 2015
EBARA CORPORATION
Mitsunori SUGIYAMA
B24 - GRINDING POLISHING
Information
Patent Application
FAILURE DETECTION APPARATUS FOR SUBSTRATE PROCESSING APPARATUS, AND...
Publication number
20150198947
Publication date
Jul 16, 2015
EBARA CORPORATION
Mitsunori SUGIYAMA
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150122295
Publication date
May 7, 2015
EBARA CORPORATION
Masafumi Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIT CONTROL PANEL, SUBSTRATE TRANSFER TEST METHOD, AND SUBSTRATE P...
Publication number
20150071742
Publication date
Mar 12, 2015
EBARA CORPORATION
Shunsuke MATSUZAWA
B08 - CLEANING
Information
Patent Application
POLISHING APPARATUS AND PROGRAM THEREOF
Publication number
20100130103
Publication date
May 27, 2010
Hidetaka Nakao
G05 - CONTROLLING REGULATING
Information
Patent Application
Polishing apparatus
Publication number
20070087663
Publication date
Apr 19, 2007
Takuji Hayama
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus
Publication number
20060148382
Publication date
Jul 6, 2006
Takuji Hayama
B24 - GRINDING POLISHING
Information
Patent Application
Data processing system
Publication number
20050193156
Publication date
Sep 1, 2005
Masafumi Inoue
G06 - COMPUTING CALCULATING COUNTING