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Masafumi Inoue
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Magnetic bearing device
Patent number
6,326,712
Issue date
Dec 4, 2001
Ebara Corporation
Toshiharu Nakazawa
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
Vacuum evacuation device and method, and substrate processing appar...
Publication number
20070048145
Publication date
Mar 1, 2007
Katsutoshi Ishii
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...