Masafumi Nomura

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Developing method and apparatus
- Patent number 7,182,531
- Issue date Feb 27, 2007
- Tokyo Electron Limited
- Kiyohisa Tateyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method and apparatus
- Patent number 7,101,646
- Issue date Sep 5, 2006
- Tokyo Electron Limited
- Kiyohisa Tateyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method and apparatus
- Patent number 6,969,572
- Issue date Nov 29, 2005
- Tokyo Electron Limited
- Kiyohisa Tateyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and coating method
- Patent number 6,635,113
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Hideyuki Takamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin coating apparatus
- Patent number 6,447,608
- Issue date Sep 10, 2002
- Tokyo Electron Limited
- Mitsuhiro Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 6,306,455
- Issue date Oct 23, 2001
- Tokyo Electron Limited
- Hideyuki Takamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin coating process
- Patent number 6,159,541
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Mitsuhiro Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and processing method
- Patent number 5,965,200
- Issue date Oct 12, 1999
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and processing method
- Patent number 5,871,584
- Issue date Feb 16, 1999
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and processing method
- Patent number 5,815,762
- Issue date Sep 29, 1998
- Tokyo Electron Limited
- Mitsuhiro Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hydrophobic treatment method involving delivery of a liquid process...
- Patent number 5,681,614
- Issue date Oct 28, 1997
- Tokyo Electron Limited
- Tsutae Omori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrophobic processing apparatus including a liquid delivery system
- Patent number 5,505,781
- Issue date Apr 9, 1996
- Tokyo Electron Limited
- Tsutae Omori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus with a gas distributor having back and forth p...
- Patent number 5,445,699
- Issue date Aug 29, 1995
- Tokyo Electron Kyushu Limited
- Yuuji Kamikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Indirect temperature-measurement of films formed on semiconductor w...
- Patent number 5,249,142
- Issue date Sep 28, 1993
- Tokyo Electron Kyushu Limited
- Eiichi Shirakawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Developing method and apparatus
- Publication number 20060246384
- Publication date Nov 2, 2006
- TOKYO ELECTRON LIMITED
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing method and apparatus
- Publication number 20060024622
- Publication date Feb 2, 2006
- TOKYO ELECTRON LIMITED
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing method and apparatus
- Publication number 20040096760
- Publication date May 20, 2004
- TOKYO ELECTRON LIMITED
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20020152954
- Publication date Oct 24, 2002
- HIDEYUKI TAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method
- Publication number 20020025375
- Publication date Feb 28, 2002
- Hideyuki Takamori
- H01 - BASIC ELECTRIC ELEMENTS

Masafumi Nomura

Person

Patents Grantslast 30 patents

Developing method and apparatus

Developing method and apparatus

Developing method and apparatus

Coating apparatus and coating method

Spin coating apparatus

Substrate processing method

Spin coating process

Processing apparatus and processing method

Processing apparatus and processing method

Processing apparatus and processing method

Hydrophobic treatment method involving delivery of a liquid process...

Hydrophobic processing apparatus including a liquid delivery system

Processing apparatus with a gas distributor having back and forth p...

Indirect temperature-measurement of films formed on semiconductor w...

Patents Applicationslast 30 patents

Developing method and apparatus

Developing method and apparatus

Developing method and apparatus

COATING APPARATUS AND COATING METHOD

Substrate processing method