Masafumi Shoji

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus, heat treatment method, and program
- Patent number 9,905,442
- Issue date Feb 27, 2018
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND PROGRAM
- Publication number 20160293457
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS