Masafumi Urakawa

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Salem, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for dry etching a hafnium containing material
- Patent number 8,183,161
- Issue date May 22, 2012
- Tokyo Electron Limited
- Luis Isidro Fernandez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for reducing line edge roughness during pattern e...
- Patent number 7,846,645
- Issue date Dec 7, 2010
- Tokyo Electron Limited
- Masafumi Urakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced contaminant gas injection system and method of using
- Patent number 7,743,731
- Issue date Jun 29, 2010
- Tokyo Electron Limited
- Takashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCH...
- Publication number 20240162047
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Takahiro YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER
- Publication number 20230386798
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Mohd Fairuz BIN BUDIMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon carbide focus ring for plasma etching system
- Publication number 20090151870
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Masafumi URAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for reducing line edge roughness during pattern e...
- Publication number 20090155731
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Masafumi URAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for dry etching a hafnium containing material
- Publication number 20080064220
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Luis Isidro Fernandez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced contaminant gas injection system and method of using
- Publication number 20070235136
- Publication date Oct 11, 2007
- Takashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS