Masaharu SATO

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 10,559,480
- Issue date Feb 11, 2020
- SCREEN Holdings Co., Ltd.
- Koji Kurasaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20180277454
- Publication date Sep 27, 2018
- SCREEN Holdings Co., Ltd.
- Koji KURASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20180247839
- Publication date Aug 30, 2018
- SCREEN Holdings Co., Ltd.
- Koji KURASAKI
- B08 - CLEANING