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Masaharu Sugiyama

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 7,488,689
    • Issue date Feb 10, 2009
    • Tokyo Electron Limited
    • Shinya Morikita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    CLEANING METHOD FOR PLASMA PROCESSING APPARATUS
    • Publication number 20150243489
    • Publication date Aug 27, 2015
    • TOKYO ELECTRON LIMITED
    • Hiroshi Uda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD, APPARATUS AND STORAGE MEDIUM
    • Publication number 20070163995
    • Publication date Jul 19, 2007
    • TOKYO ELECTRON LIMITED
    • Masaru SUGIMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma etching method
    • Publication number 20060118520
    • Publication date Jun 8, 2006
    • TOKYO ELECTRON LIMITED
    • Shinya Morikita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...