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Masahide Itoh
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Gas supply unit, substrate processing apparatus and supply gas sett...
Patent number
9,441,791
Issue date
Sep 13, 2016
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply unit, substrate processing apparatus and supply gas sett...
Patent number
8,906,193
Issue date
Dec 9, 2014
Tokyo Electron Limited
Kenetsu Mizusawa
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Exhaust system for film forming apparatus
Patent number
5,788,747
Issue date
Aug 4, 1998
Tokyo Electron Limited
Takashi Horiuchi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Process gas supply apparatus
Patent number
5,730,804
Issue date
Mar 24, 1998
Tokyo Electron Limited
Hisashi Gomi
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Patents Applications
last 30 patents
Information
Patent Application
GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS AND SUPPLY GAS SETT...
Publication number
20130092322
Publication date
Apr 18, 2013
TOKYO ELECTRON LIMITED
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS AND SUPPLY GAS SETT...
Publication number
20100163112
Publication date
Jul 1, 2010
TOKYO ELECTRON LIMITED
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
Publication number
20070107845
Publication date
May 17, 2007
Shigeru Ishizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gas supply unit, substrate processing apparatus, and supply gas set...
Publication number
20060124169
Publication date
Jun 15, 2006
TOKYO ELECTRON LIMITED
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor processing system
Publication number
20040238122
Publication date
Dec 2, 2004
Shigeru Ishizawa
H01 - BASIC ELECTRIC ELEMENTS