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Masahide Iwakata
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Taito-ku, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Photomask blank and photomask
Patent number
8,007,964
Issue date
Aug 30, 2011
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask blank, photomask and fabrication method thereof
Patent number
7,771,893
Issue date
Aug 10, 2010
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Photomask blank and photomask
Patent number
7,691,546
Issue date
Apr 6, 2010
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask blank, photomask and fabrication method thereof
Patent number
7,625,676
Issue date
Dec 1, 2009
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Photomask blank, photomask and method for producing those
Patent number
7,618,753
Issue date
Nov 17, 2009
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-depositing target and preparation of phase shift mask blank
Patent number
7,598,004
Issue date
Oct 6, 2009
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Halftone phase shift mask blank, halftone phase shift mask, and pat...
Patent number
7,556,892
Issue date
Jul 7, 2009
Shin-Etsu Chemical Co., Ltd.
Kimihiro Okada
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
PHOTOMASK BLANK AND PHOTOMASK
Publication number
20100143831
Publication date
Jun 10, 2010
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FILM-DEPOSITING TARGET AND PREPARATION OF PHASE SHIFT MASK BLANK
Publication number
20090057143
Publication date
Mar 5, 2009
Hiroki YOSHIKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Photomask Blank and Photomask
Publication number
20080063950
Publication date
Mar 13, 2008
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask Blank, Photomask and Method for Producing Those
Publication number
20070259276
Publication date
Nov 8, 2007
Hiroki Yoshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Photomask blank, photomask and fabrication method thereof
Publication number
20070020534
Publication date
Jan 25, 2007
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask blank, photomask and fabrication method thereof
Publication number
20060088774
Publication date
Apr 27, 2006
Hiroki Yoshikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone phase shift mask blank, halftone phase shift mask, and pat...
Publication number
20050244722
Publication date
Nov 3, 2005
Shin-Etsu Chemical Co., Ltd.
Kimihiro Okada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Film-depositing target and preparation of phase shift mask blank
Publication number
20050217988
Publication date
Oct 6, 2005
Shin-Etsu Chemical Co., Ltd.
Hiroki Yoshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...