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Ehime, JP
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Patents Grants
last 30 patents
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Patent Grant
Ion implantation apparatus and measurement device
Patent number
10,825,654
Issue date
Nov 3, 2020
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Noriyasu Ido
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and method of controlling ion implantati...
Patent number
9,837,248
Issue date
Dec 5, 2017
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Masahide Ooura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE
Publication number
20190244785
Publication date
Aug 8, 2019
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Noriyasu Ido
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND METHOD OF CONTROLLING ION IMPLANTATI...
Publication number
20150214007
Publication date
Jul 30, 2015
SEN Corporation
Masahide Ooura
H01 - BASIC ELECTRIC ELEMENTS