Masahide Tadokoro

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal imaging sensor for integration into track system
- Patent number 12,123,778
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Michael Carcasi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Substrate processing apparatus, estimation method of substrate proc...
- Patent number 12,051,587
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and processing condition adjustment...
- Patent number 11,809,091
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method to calibrate a plurality of wafer inspection syst...
- Patent number 11,703,459
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for spin process video analysis during substrat...
- Patent number 11,637,031
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for monitoring one or more characteristics of a...
- Patent number 11,474,028
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated film removing apparatus
- Patent number 11,062,899
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Takafumi Hasimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,649,335
- Issue date May 12, 2020
- Tokyo Electron Limited
- Teruhiko Kodama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Light irradiation apparatus
- Patent number 9,899,243
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heating device, coating/developing system, heating method, coating/...
- Patent number 8,927,906
- Issue date Jan 6, 2015
- Tokyo Electron Limited
- Masahide Tadokoro
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,698,052
- Issue date Apr 15, 2014
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method, computer-readable storage medium, and...
- Patent number 8,308,381
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 8,253,077
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,242,417
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature setting method and apparatus for a thermal processing p...
- Patent number 8,135,487
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Megumi Jyousaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 7,985,516
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, computer-readable storage medium, and...
- Patent number 7,968,260
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature setting method for thermal processing plate, temperatur...
- Patent number 7,957,828
- Issue date Jun 7, 2011
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature setting method of thermal processing plate, computer-re...
- Patent number 7,910,863
- Issue date Mar 22, 2011
- Tokyo Electron Limited
- Megumi Jyousaka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Temperature setting method of thermal processing plate, temperature...
- Patent number 7,902,485
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Megumi Jyousaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,867,674
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature setting of thermal processing plate using zernike coeff...
- Patent number 7,715,952
- Issue date May 11, 2010
- Tokyo Electron Limited
- Megumi Jyousaka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of setting focus condition at time of exposure, apparatus fo...
- Patent number 7,643,126
- Issue date Jan 5, 2010
- Tokyo Electron Limited
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of setting processing condition in photolithography process,...
- Patent number 7,420,650
- Issue date Sep 2, 2008
- Tokyo Electron Limited
- Michio Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20240355617
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK
- Publication number 20220269177
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING CONDITION ADJUSTMENT...
- Publication number 20220252992
- Publication date Aug 11, 2022
- Tokyo Electron Limited
- Masahide TADOKORO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20210387224
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Thermal Imaging Sensor for Integration into Track System
- Publication number 20210285822
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...
- Publication number 20210262781
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210129166
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210134637
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...
- Publication number 20210131977
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Monitoring One or More Characteristics of a...
- Publication number 20210109015
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20180253007
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- G01 - MEASURING TESTING
Information Patent Application
COATED FILM REMOVING APPARATUS, COATED FILM REMOVING METHOD AND STO...
- Publication number 20180211832
- Publication date Jul 26, 2018
- TOKYO ELECTRON LIMITED
- Takafumi HASIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION APPARATUS
- Publication number 20160170316
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20120279955
- Publication date Nov 8, 2012
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20110242513
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND...
- Publication number 20110209826
- Publication date Sep 1, 2011
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEATING DEVICE, COATING/DEVELOPING SYSTEM, HEATING METHOD, COATING/...
- Publication number 20110189602
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20090269686
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND...
- Publication number 20090214963
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090104548
- Publication date Apr 23, 2009
- TOKYO ELECTRON LIMITED
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...
- Publication number 20090082911
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Megumi JYOUSAKA
- G05 - CONTROLLING REGULATING
Information Patent Application
TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...
- Publication number 20090078695
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Megumi Jyousaka
- G05 - CONTROLLING REGULATING
Information Patent Application
TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, TEMPERATURE...
- Publication number 20090008381
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Megumi Jyousaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...
- Publication number 20080257495
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...
- Publication number 20080257496
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Megumi JYOUSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20070272680
- Publication date Nov 29, 2007
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of setting focus condition at time of exposure, apparatus fo...
- Publication number 20060199090
- Publication date Sep 7, 2006
- TOKYO ELECTRON LIMITED
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of setting processing condition in photolithography process,...
- Publication number 20060198633
- Publication date Sep 7, 2006
- TOKYO ELECTRON LIMITED
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masahide Tadokoro

Person

Patents Grantslast 30 patents

Thermal imaging sensor for integration into track system

Substrate processing apparatus, estimation method of substrate proc...

Substrate processing apparatus and processing condition adjustment...

System and method to calibrate a plurality of wafer inspection syst...

Systems and methods for spin process video analysis during substrat...

Systems and methods for monitoring one or more characteristics of a...

Coated film removing apparatus

Substrate processing apparatus, substrate processing method and sto...

Light irradiation apparatus

Heating device, coating/developing system, heating method, coating/...

Temperature control method of heat processing plate, computer stora...

Substrate processing method, computer-readable storage medium, and...

Substrate processing method, computer-readable storage medium and s...

Temperature control method of heat processing plate, computer stora...

Temperature setting method and apparatus for a thermal processing p...

Substrate processing method, computer-readable storage medium and s...

Substrate processing method, computer-readable storage medium, and...

Temperature setting method for thermal processing plate, temperatur...

Temperature setting method of thermal processing plate, computer-re...

Temperature setting method of thermal processing plate, temperature...

Substrate-processing apparatus, substrate-processing method, substr...

Temperature setting of thermal processing plate using zernike coeff...

Method of setting focus condition at time of exposure, apparatus fo...

Method of setting processing condition in photolithography process,...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK

SUBSTRATE PROCESSING APPARATUS AND PROCESSING CONDITION ADJUSTMENT...

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

Thermal Imaging Sensor for Integration into Track System

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...

Systems and Methods for Spin Process Video Analysis During Substrat...

Systems and Methods for Spin Process Video Analysis During Substrat...

SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...

Systems and Methods for Monitoring One or More Characteristics of a...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

COATED FILM REMOVING APPARATUS, COATED FILM REMOVING METHOD AND STO...

LIGHT IRRADIATION APPARATUS

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND...

HEATING DEVICE, COATING/DEVELOPING SYSTEM, HEATING METHOD, COATING/...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND...

SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...

TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...

TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...

TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, TEMPERATURE...

TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...

TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

Method of setting focus condition at time of exposure, apparatus fo...

Method of setting processing condition in photolithography process,...