Masahiko EGASHIRA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of inspecting back surface of epitaxial wafer, epitaxial waf...
- Patent number 10,718,722
- Issue date Jul 21, 2020
- Sumco Corporation
- Keiko Matsuo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for inspecting back surface of epitaxial wafer and method...
- Patent number 10,338,005
- Issue date Jul 2, 2019
- Sumco Corporation
- Tatsuya Osada
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection method and wafer inspection apparatus
- Patent number 10,161,883
- Issue date Dec 25, 2018
- Sumco Corporation
- Tatsuya Osada
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF INSPECTING BACK SURFACE OF EPITAXIAL WAFER, EPITAXIAL WAF...
- Publication number 20200072762
- Publication date Mar 5, 2020
- SUMCO CORPORATION
- Keiko MATSUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER INSPECTION METHOD AND WAFER INSPECTION APPARATUS
- Publication number 20180328859
- Publication date Nov 15, 2018
- SUMCO CORPORATION
- Tatsuya OSADA
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTING BACK SURFACE OF EPITAXIAL WAFER AND METHOD...
- Publication number 20180306731
- Publication date Oct 25, 2018
- SUMCO CORPORATION
- Tatsuya OSADA
- G01 - MEASURING TESTING