Masahiko Harumoto

Person

Shimogyo-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure device
- Patent number 11,281,108
- Issue date Mar 22, 2022
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,243,469
- Issue date Feb 8, 2022
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method
- Patent number 11,107,698
- Issue date Aug 31, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing unit and substrate processing apparatus
- Patent number 11,004,702
- Issue date May 11, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method an...
- Patent number 10,955,745
- Issue date Mar 23, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating method
- Patent number 10,941,492
- Issue date Mar 9, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus used therefor
- Patent number 10,900,126
- Issue date Jan 26, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing unit, substrate processing apparatus and substrate...
- Patent number 10,854,480
- Issue date Dec 1, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for processing substrate
- Patent number 10,840,096
- Issue date Nov 17, 2020
- SCREEN Holdings Co., Ltd.
- Takahiro Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal processing device, substrate processing apparatus, thermal...
- Patent number 10,832,925
- Issue date Nov 10, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Development unit, substrate processing apparatus, development metho...
- Patent number 10,754,251
- Issue date Aug 25, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method
- Patent number 10,684,548
- Issue date Jun 16, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,591,820
- Issue date Mar 17, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method
- Patent number 10,569,297
- Issue date Feb 25, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method
- Patent number 10,539,877
- Issue date Jan 21, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device substrate processing apparatus, exposure method of...
- Patent number 10,444,636
- Issue date Oct 15, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method of...
- Patent number 10,401,736
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching device, substrate processing apparatus, etching method and...
- Patent number 10,395,942
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,331,034
- Issue date Jun 25, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method
- Patent number 10,185,219
- Issue date Jan 22, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,047,441
- Issue date Aug 14, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,828,676
- Issue date Nov 28, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Developing apparatus
- Patent number 9,581,907
- Issue date Feb 28, 2017
- Screen Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,375,748
- Issue date Jun 28, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 9,028,621
- Issue date May 12, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method
- Patent number 8,956,695
- Issue date Feb 17, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate developing method and developing apparatus
- Patent number 8,137,576
- Issue date Mar 20, 2012
- Sokudo Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 7,597,491
- Issue date Oct 6, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM PROCESSING METHOD
- Publication number 20210233784
- Publication date Jul 29, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20210134605
- Publication date May 6, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE
- Publication number 20210088911
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20210078036
- Publication date Mar 18, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20190294049
- Publication date Sep 26, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE
- Publication number 20190228964
- Publication date Jul 25, 2019
- SCREEN Holdings Co., Ltd.
- Takahiro YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190196335
- Publication date Jun 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20190107780
- Publication date Apr 11, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...
- Publication number 20190086808
- Publication date Mar 21, 2019
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190041754
- Publication date Feb 7, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...
- Publication number 20190041755
- Publication date Feb 7, 2019
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190004427
- Publication date Jan 3, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...
- Publication number 20180315623
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315625
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253012
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253011
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20180230598
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20180230599
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20180147599
- Publication date May 31, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...
- Publication number 20180076056
- Publication date Mar 15, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...
- Publication number 20180050368
- Publication date Feb 22, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180044795
- Publication date Feb 15, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD
- Publication number 20180036767
- Publication date Feb 8, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160289839
- Publication date Oct 6, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVELOPING METHOD
- Publication number 20160195811
- Publication date Jul 7, 2016
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS
- Publication number 20150104747
- Publication date Apr 16, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140022521
- Publication date Jan 23, 2014
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS
- Publication number 20120122038
- Publication date May 17, 2012
- SOKUDO CO., LTD.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
- Publication number 20120006361
- Publication date Jan 12, 2012
- Tadashi MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS

Masahiko Harumoto

Person

Patents Grantslast 30 patents

Film processing method

Substrate processing apparatus, film formation unit, substrate proc...

Exposure device

Substrate processing apparatus and substrate processing method

Substrate treating method

Film processing unit and substrate processing apparatus

Exposure device, substrate processing apparatus, exposure method an...

Substrate treating method

Substrate treating method and apparatus used therefor

Film processing unit, substrate processing apparatus and substrate...

Method for processing substrate

Thermal processing device, substrate processing apparatus, thermal...

Development unit, substrate processing apparatus, development metho...

Developing method

Substrate processing apparatus and substrate processing method

Coating method

Developing method

Exposure device substrate processing apparatus, exposure method of...

Exposure device, substrate processing apparatus, exposure method of...

Etching device, substrate processing apparatus, etching method and...

Substrate processing apparatus and substrate processing method

Developing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Developing apparatus

Substrate processing apparatus and substrate processing method

Substrate cleaning method and substrate cleaning device

Developing method

Substrate developing method and developing apparatus

Apparatus for and method of processing substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

FILM PROCESSING METHOD

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

EXPOSURE DEVICE

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

DEVELOPING METHOD

METHOD FOR PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING METHOD

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...

FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

SUBSTRATE TREATING METHOD

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...

THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

COATING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING METHOD

DEVELOPING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING APPARATUS

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE