TREA

Masahiko ISHIDA

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Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering apparatus and sputtering method
    • Patent number 9,209,001
    • Issue date Dec 8, 2015
    • ULVAC, Inc.
    • Naoki Morimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate holding device
    • Patent number 8,817,449
    • Issue date Aug 26, 2014
    • ULVAC, Inc.
    • Naoki Morimoto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of managing substrate
    • Patent number 8,389,411
    • Issue date Mar 5, 2013
    • ULVAC, Inc.
    • Masahiko Ishida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Cleaning method and a vacuum processing apparatus
    • Patent number 8,357,265
    • Issue date Jan 22, 2013
    • Ulvac, Inc.
    • Kouji Sogabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents