Membership
Tour
Register
Log in
Masahiko Kaminishi
Follow
Person
Kai-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Nozzle and substrate processing apparatus using same
Patent number
10,472,719
Issue date
Nov 12, 2019
Tokyo Electron Limited
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of detoxifying exhaust pipe and film forming apparatus
Patent number
10,053,776
Issue date
Aug 21, 2018
Tokyo Electron Limited
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
9,929,008
Issue date
Mar 27, 2018
Tokyo Electron Limited
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method
Patent number
9,252,043
Issue date
Feb 2, 2016
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a film using a turntable apparatus
Patent number
8,987,147
Issue date
Mar 24, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method
Patent number
8,980,371
Issue date
Mar 17, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method
Patent number
8,962,495
Issue date
Feb 24, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method of forming thin film including adsorption step...
Patent number
8,778,812
Issue date
Jul 15, 2014
Tokyo Electron Limited
Haruhiko Furuya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing apparatus, method for regulating temperature of...
Patent number
8,354,135
Issue date
Jan 15, 2013
Tokyo Electron Limited
Yuichi Takenaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation method and apparatus for semiconductor process
Patent number
7,637,268
Issue date
Dec 29, 2009
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS
Publication number
20160220953
Publication date
Aug 4, 2016
TOKYO ELECTRON LIMITED
Yu Wamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME
Publication number
20160138158
Publication date
May 19, 2016
TOKYO ELECTRON LIMITED
Yu WAMURA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20160111278
Publication date
Apr 21, 2016
TOKYO ELECTRON LIMITED
Yu WAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING A FILM
Publication number
20140179121
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Hiroaki IKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD, STORAGE MEDIUM, AND FILM DEPOSITION APPARATUS
Publication number
20140147591
Publication date
May 29, 2014
TOKYO ELECTRON LIMITED
Hiroaki IKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20140011353
Publication date
Jan 9, 2014
Hiroaki IKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20130337658
Publication date
Dec 19, 2013
TOKYO ELECTRON LIMITED
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20130164945
Publication date
Jun 27, 2013
TOKYO ELECTRON LIMITED
Haruhiko FURUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL PROCESSING APPARATUS, METHOD FOR REGULATING TEMPERATURE OF...
Publication number
20090232967
Publication date
Sep 17, 2009
TOKYO ELECTRON LIMITED
Yuichi TAKENAGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film formation method and apparatus for semiconductor process
Publication number
20060288935
Publication date
Dec 28, 2006
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...