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Yamanashi, JP
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last 30 patents
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Patent Grant
Electric probing-test machine having a cooling system
Patent number
5,198,752
Issue date
Mar 30, 1993
Tokyo Electron Limited
Eiji Miyata
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Electric probing-test machine having a cooling system
Patent number
5,084,671
Issue date
Jan 28, 1992
Tokyo Electron Limited
Eiji Miyata
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...