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Masahiko Nakada
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Okegawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for measuring alignment accuracy, as well as m...
Patent number
7,271,908
Issue date
Sep 18, 2007
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for measuring alignment accuracy, as well as m...
Patent number
6,897,956
Issue date
May 24, 2005
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Apparatus and method for measuring alignment accuracy, as well as m...
Publication number
20050206898
Publication date
Sep 22, 2005
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for measuring alignment accuracy, as well as m...
Publication number
20030160960
Publication date
Aug 28, 2003
Minori Noguchi
G01 - MEASURING TESTING