Masahiko OKA

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Kumamoto, JP

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Patents Applicationslast 30 patents

Information Patent Application
FOCUS RING AND PLASMA PROCESSING APPARATUS
- Publication number 20180240651
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING AND PLASMA PROCESSING APPARATUS
- Publication number 20150114567
- Publication date Apr 30, 2015
- Greene, Tweed Technologies, Inc.
- Nobuyuki NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS