Masahiko Takahashi

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Beaverton, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching apparatus
- Patent number 8,980,048
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Tetsuya Nishizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 8,753,527
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Tetsuya Nishizuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING APPARATUS
- Publication number 20140231017
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Tetsuya Nishizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20130071955
- Publication date Mar 21, 2013
- TOKYO ELECTRON LIMITED
- Hiroki Kintaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20110266257
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Tetsuya Nishizuka
- H01 - BASIC ELECTRIC ELEMENTS