Masahiko UCHIYAMA

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Yongin-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Purge module and load port having the same
- Patent number 10,141,210
- Issue date Nov 27, 2018
- RORZE SYSTEMS CORPORATION
- Seung Bae Oh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PURGE MODULE AND LOAD PORT HAVING THE SAME
- Publication number 20170170043
- Publication date Jun 15, 2017
- RORZE SYSTEMS CORPORATION
- Seung Bae OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER ETCHING SYSTEM AND WAFER ETCHING PROCESS USING THE SAME
- Publication number 20150262854
- Publication date Sep 17, 2015
- ROREZ SYSTEMS CORPORATION
- Ki-Yong You
- H01 - BASIC ELECTRIC ELEMENTS