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Masahiko Uchiyama
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Hiroshima, JP
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Patents Grants
last 30 patents
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Patent Grant
Microwave plasma generation method and microwave plasma generator
Patent number
7,795,818
Issue date
Sep 14, 2010
Adtec Plasma Technology Co., Ltd.
Takuya Urayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Microwave Plasma Generation Method and Microwave Plasma Generator
Publication number
20090128041
Publication date
May 21, 2009
Takuya Urayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR