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Masahiko Yomoto
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Urayasu, JP
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last 30 patents
Information
Patent Grant
Flatness measuring apparatus
Patent number
6,323,952
Issue date
Nov 27, 2001
Nikon Corporation
Masahiko Yomoto
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring temperature of semiconductor substrate and app...
Patent number
4,890,245
Issue date
Dec 26, 1989
Nikon Corporation
Masahiko Yomoto
G01 - MEASURING TESTING
Information
Patent Grant
Light radiation apparatus
Patent number
4,859,832
Issue date
Aug 22, 1989
Nikon Corporation
Makoto Uehara
H01 - BASIC ELECTRIC ELEMENTS