Masahiro ABE

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,276,406
- Issue date Apr 30, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke Hayashi
- B08 - CLEANING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,607,865
- Issue date Mar 28, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,553,003
- Issue date Jan 24, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261549
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261554
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261566
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING