Masahiro Abe

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device, substrate transfer method and recording...
- Patent number 10,879,100
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Tokutarou Hayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,643,872
- Issue date May 5, 2020
- Tokyo Electron Limited
- Masahiro Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD AND RECORDING...
- Publication number 20180240695
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20170358464
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Masahiro Abe
- H01 - BASIC ELECTRIC ELEMENTS