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Masahiro ATSUMI

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Deposition apparatus
    • Patent number 11,821,067
    • Issue date Nov 21, 2023
    • Canon Anelva Corporation
    • Masahiro Atsumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition apparatus
    • Patent number 10,917,960
    • Issue date Feb 9, 2021
    • Canon Anelva Corporation
    • Masahiro Atsumi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deposition apparatus
    • Patent number 10,676,813
    • Issue date Jun 9, 2020
    • Canon Anelva Corporation
    • Masahiro Atsumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support apparatus and substrate transport apparatus havin...
    • Patent number 8,770,906
    • Issue date Jul 8, 2014
    • Canon Anelva Corporation
    • Masahiro Atsumi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20240052477
    • Publication date Feb 15, 2024
    • Canon ANELVA Corporation
    • Masahiro ATSUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20200255933
    • Publication date Aug 13, 2020
    • Canon ANELVA Corporation
    • Masahiro ATSUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20170202077
    • Publication date Jul 13, 2017
    • Canon ANELVA Corporation
    • Masahiro ATSUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20160326630
    • Publication date Nov 10, 2016
    • Canon ANELVA Corporation
    • Masahiro ATSUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20140230728
    • Publication date Aug 21, 2014
    • Canon ANELVA Corporation
    • Yuji Kajihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT APPARATUS, SUBSTRATE TRANSPORT APPARATUS, AND ELE...
    • Publication number 20100221089
    • Publication date Sep 2, 2010
    • Canon ANELVA Corporation
    • Masahiro Atsumi
    • H01 - BASIC ELECTRIC ELEMENTS