Masahiro DOGOME

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,952
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, transfer system, and end effector
- Patent number 12,191,188
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,080,572
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and substrate support of plasma process...
- Patent number 11,972,933
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate accommodating device and processing system
- Patent number 11,969,879
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer apparatus
- Patent number 11,948,816
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system and load lock module
- Patent number 11,791,180
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for transferring substrate, system for processing substrate,...
- Patent number 11,728,205
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Masahiro Dogome
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate gripping mechanism, substrate transfer device, and substr...
- Patent number 11,257,707
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Masahiro Dogome
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Conveyance robot replacement apparatus and conveyance robot replace...
- Patent number 10,133,266
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Masahiro Dogome
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate conveyance method
- Patent number 9,805,960
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250096020
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
- Publication number 20250069940
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS
- Publication number 20240213057
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ACCOMMODATING DEVICE AND PROCESSING SYSTEM
- Publication number 20220274260
- Publication date Sep 1, 2022
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220230898
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS
- Publication number 20220208574
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220208576
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR TRANSFERRING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE,...
- Publication number 20220059395
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
- Publication number 20220051928
- Publication date Feb 17, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT OF PLASMA PROCESS...
- Publication number 20220013339
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE
- Publication number 20210280441
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE GRIPPING MECHANISM, SUBSTRATE TRANSFER DEVICE, AND SUBSTR...
- Publication number 20190214289
- Publication date Jul 11, 2019
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE CONVEYANCE METHOD
- Publication number 20170011940
- Publication date Jan 12, 2017
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE ROBOT REPLACEMENT APPARATUS AND CONVEYANCE ROBOT REPLACE...
- Publication number 20160011587
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- G05 - CONTROLLING REGULATING

Masahiro DOGOME

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Transfer device, transfer system, and end effector

Substrate processing apparatus

Plasma processing apparatus and substrate support of plasma process...

Substrate accommodating device and processing system

Transfer apparatus

Substrate transfer system and load lock module

Device for transferring substrate, system for processing substrate,...

Substrate gripping mechanism, substrate transfer device, and substr...

Conveyance robot replacement apparatus and conveyance robot replace...

Substrate conveyance method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR

TRANSFER APPARATUS

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

SUBSTRATE ACCOMMODATING DEVICE AND PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS

TRANSFER APPARATUS

SUBSTRATE PROCESSING APPARATUS

DEVICE FOR TRANSFERRING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE,...

TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR

PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT OF PLASMA PROCESS...

SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE

SUBSTRATE GRIPPING MECHANISM, SUBSTRATE TRANSFER DEVICE, AND SUBSTR...

SUBSTRATE CONVEYANCE METHOD

CONVEYANCE ROBOT REPLACEMENT APPARATUS AND CONVEYANCE ROBOT REPLACE...