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Masahiro Funayama
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Device manufactured by room-temperature bonding, device manufacturi...
Patent number
10,112,376
Issue date
Oct 30, 2018
MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL, CO., LTD.
Jun Utsumi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Manufcaturing method for room-temperature substrate bonding
Patent number
8,936,998
Issue date
Jan 20, 2015
Mitsubishi Heavy Industries, Ltd.
Jun Utsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Room-temperature bonding method and room-temperature bonding appara...
Patent number
8,608,048
Issue date
Dec 17, 2013
Mitsubishi Heavy Industries, Ltd.
Takayuki Goto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Room temperature bonding using sputtering
Patent number
8,602,289
Issue date
Dec 10, 2013
Mitsubishi Heavy Industries, Ltd.
Takayuki Goto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor element module and method for manufacturing the same
Patent number
8,222,724
Issue date
Jul 17, 2012
Mitsubishi Heavy Industries, Ltd.
Daishi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DEVICE MANUFACTURED BY ROOM-TEMPERATURE BONDING, DEVICE MANUFACTURI...
Publication number
20160250838
Publication date
Sep 1, 2016
MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO., LTD.
Jun UTSUMI
B32 - LAYERED PRODUCTS
Information
Patent Application
DEVICE AND DEVICE MANUFACTURE METHOD
Publication number
20130213561
Publication date
Aug 22, 2013
Jun UTSUMI
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
ROOM-TEMPERATURE BONDING METHOD AND ROOM-TEMPERATURE BONDING APPARATUS
Publication number
20110214816
Publication date
Sep 8, 2011
Takayuki Goto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR ELEMENT MODULE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20110062600
Publication date
Mar 17, 2011
Daishi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND DEVICE MANUFACTURE METHOD
Publication number
20100276723
Publication date
Nov 4, 2010
MITSUBUISHI HEAVY INDUSTRIES, LTD.
Jun Utsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE MANUFACTURED BY ROOM-TEMPERATURE BONDING, DEVICE MANUFACTURI...
Publication number
20100092786
Publication date
Apr 15, 2010
Mitsubishi Heavy Industries, Ltd.
Jun Utsumi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ROOM-TEMPERATURE BONDING METHOD AND ROOM-TEMPERATURE BONDING APPARATUS
Publication number
20100000663
Publication date
Jan 7, 2010
Takayuki Goto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR