Masahiro Hatakayama

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Fujisawa-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam apparatus and a device manufacturing method using the...
- Patent number 7,385,197
- Issue date Jun 10, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Electron beam apparatus and a device manufacturing method using the...
- Publication number 20060016989
- Publication date Jan 26, 2006
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING