Masahiro Horie

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Spectroscopic ellipsometer, film thickness measuring apparatus, and...
- Patent number 7,929,139
- Issue date Apr 19, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Measuring method and apparatus for measuring depth of trench pattern
- Patent number 7,710,579
- Issue date May 4, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Shinji Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Surface form measuring apparatus and stress measuring apparatus and...
- Patent number 7,612,873
- Issue date Nov 3, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Kumiko Akashika
- G01 - MEASURING TESTING
Information Patent Grant
Spectroscopic ellipsometer
- Patent number 7,095,498
- Issue date Aug 22, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measuring film thickness formed on object, apparatus...
- Patent number 6,937,333
- Issue date Aug 30, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring dielectric constant using light in a plurality...
- Patent number 6,862,095
- Issue date Mar 1, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Method of and apparatus for inspecting residue of metal film
- Patent number 6,020,968
- Issue date Feb 1, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional detecting method and three-dimensional detecting...
- Patent number 5,841,894
- Issue date Nov 24, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Method of and apparatus for measuring film thickness
- Patent number 5,686,993
- Issue date Nov 11, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Masahiko Kokubo
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring film thicknesses
- Patent number 5,493,401
- Issue date Feb 20, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a thickness of a multilayered sample using ultr...
- Patent number 5,440,141
- Issue date Aug 8, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Reflected light measuring method and reflected light measuring appa...
- Patent number 5,422,703
- Issue date Jun 6, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Grant
Method of focusing optical head on object body and automatic focusi...
- Patent number 5,136,149
- Issue date Aug 4, 1992
- Dainippon Screen Mfg. Co., Ltd.
- Nariaki Fujiwara
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SPECTROSCOPIC ELLIPSOMETER AND FILM THICKNESS MEASURING APPARATUS
- Publication number 20090066953
- Publication date Mar 12, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
SPECTROSCOPIC ELLIPSOMETER, FILM THICKNESS MEASURING APPARATUS, AND...
- Publication number 20090059228
- Publication date Mar 5, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for Inspecting Defect and Method of Inspecting Defect
- Publication number 20080243412
- Publication date Oct 2, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
Surface form measuring apparatus and stress measuring apparatus and...
- Publication number 20080111987
- Publication date May 15, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kumiko Akashika
- G01 - MEASURING TESTING
Information Patent Application
Measuring method and apparatus for measuring depth of trench pattern
- Publication number 20080049222
- Publication date Feb 28, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Shinji Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Film forming apparatus and film forming method
- Publication number 20050006560
- Publication date Jan 13, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
Spectroscopic ellipsometer
- Publication number 20040233437
- Publication date Nov 25, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for measuring film thickness formed on object, apparatus...
- Publication number 20040075836
- Publication date Apr 22, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
Method of measuring dielectric constant using light in a plurality...
- Publication number 20030067603
- Publication date Apr 10, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Horie
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection of object using image processing
- Publication number 20030059103
- Publication date Mar 27, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Junichi Shiomi
- G01 - MEASURING TESTING

Masahiro Horie

Person

Patents Grantslast 30 patents

Spectroscopic ellipsometer, film thickness measuring apparatus, and...

Measuring method and apparatus for measuring depth of trench pattern

Surface form measuring apparatus and stress measuring apparatus and...

Spectroscopic ellipsometer

Apparatus for measuring film thickness formed on object, apparatus...

Method of measuring dielectric constant using light in a plurality...

Method of and apparatus for inspecting residue of metal film

Three-dimensional detecting method and three-dimensional detecting...

Method of and apparatus for measuring film thickness

Method of measuring film thicknesses

Method of measuring a thickness of a multilayered sample using ultr...

Reflected light measuring method and reflected light measuring appa...

Method of focusing optical head on object body and automatic focusi...

Patents Applicationslast 30 patents

SPECTROSCOPIC ELLIPSOMETER AND FILM THICKNESS MEASURING APPARATUS

SPECTROSCOPIC ELLIPSOMETER, FILM THICKNESS MEASURING APPARATUS, AND...

Apparatus for Inspecting Defect and Method of Inspecting Defect

Surface form measuring apparatus and stress measuring apparatus and...

Measuring method and apparatus for measuring depth of trench pattern

Film forming apparatus and film forming method

Spectroscopic ellipsometer

Apparatus for measuring film thickness formed on object, apparatus...

Method of measuring dielectric constant using light in a plurality...

Surface inspection of object using image processing