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Masahiro Inoue
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Fujisawa-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Position detecting apparatus and driving system
Patent number
9,438,147
Issue date
Sep 6, 2016
Kabushiki Kaisha Toshiba
Hiroshi Ariga
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Charged particle beam system and pattern slant observing method
Patent number
6,534,766
Issue date
Mar 18, 2003
Kabushiki Kaisha Toshiba
Hideaki Abe
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
POSITION DETECTING APPARATUS AND DRIVING SYSTEM
Publication number
20150015175
Publication date
Jan 15, 2015
Kabushiki Kaisha Toshiba
Hiroshi Ariga
G01 - MEASURING TESTING
Information
Patent Application
Charged particle beam system and pattern slant observing method
Publication number
20010025925
Publication date
Oct 4, 2001
Kabushiki Kaisha Toshiba
Hideaki Abe
G01 - MEASURING TESTING