Masahiro Kanno

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming pattern and laminate
- Patent number 9,291,908
- Issue date Mar 22, 2016
- Kabushiki Kaisha Toshiba
- Atsushi Hieno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming pattern and laminate
- Patent number 9,073,284
- Issue date Jul 7, 2015
- Kabushiki Kaisha Toshiba
- Atsushi Hieno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern formation method and polymer alloy base material
- Patent number 8,986,488
- Issue date Mar 24, 2015
- Kabushiki Kaisha Toshiba
- Shigeki Hattori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming pattern
- Patent number 8,808,973
- Issue date Aug 19, 2014
- Kabushiki Kaisha Toshiba
- Satoshi Mikoshiba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern transfer method
- Patent number 8,173,061
- Issue date May 8, 2012
- Kabushiki Kaisha Toshiba
- Masahiro Kanno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for evaluating lithography apparatus and method for controll...
- Patent number 7,883,824
- Issue date Feb 8, 2011
- Kabushiki Kaisha Toshiba
- Masafumi Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing semiconductor device and exposure system
- Patent number 7,079,219
- Issue date Jul 18, 2006
- Kabushiki Kaisha Toshiba
- Masahiro Kanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Etching apparatus and etching method
- Patent number 6,620,334
- Issue date Sep 16, 2003
- Kabushiki Kaisha Toshiba
- Masahiro Kanno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING PATTERN AND LAMINATE
- Publication number 20150261092
- Publication date Sep 17, 2015
- Kabushiki Kaisha Toshiba
- Atsushi HIENO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMATION METHOD
- Publication number 20140248439
- Publication date Sep 4, 2014
- Kabushiki Kaisha Toshiba
- Hironobu SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN FORMATION METHOD AND POLYMER ALLOY BASE MATERIAL
- Publication number 20130133825
- Publication date May 30, 2013
- Kabushiki Kaisha Toshiba
- Shigeki HATTORI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING PATTERN AND LAMINATE
- Publication number 20130078570
- Publication date Mar 28, 2013
- Atsushi HIENO
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF FORMING PATTERN
- Publication number 20120214094
- Publication date Aug 23, 2012
- Satoshi MIKOSHIBA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN FORMATION METHOD, PATTERN FORMATION SYSTEM, AND METHOD FOR...
- Publication number 20110111593
- Publication date May 12, 2011
- Masahiro KANNO
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN TRANSFER METHOD
- Publication number 20100270711
- Publication date Oct 28, 2010
- Masahiro KANNO
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR EVALUATING LITHOGRAPHY APPARATUS AND METHOD FOR CONTROLL...
- Publication number 20090246654
- Publication date Oct 1, 2009
- Masafumi Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for adjusting manufacturing equipment, method for adjusting...
- Publication number 20070212801
- Publication date Sep 13, 2007
- Masahiro Kanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for manufacturing semiconductor device and exposure system
- Publication number 20050079428
- Publication date Apr 14, 2005
- Masahiro Kanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Etching apparatus and etching method
- Publication number 20020142615
- Publication date Oct 3, 2002
- Kabushiki Kaisha Toshiba
- Masahiro Kanno
- H01 - BASIC ELECTRIC ELEMENTS

Masahiro Kanno

Person

Patents Grantslast 30 patents

Method of forming pattern and laminate

Method of forming pattern and laminate

Pattern formation method and polymer alloy base material

Method of forming pattern

Pattern transfer method

Method for evaluating lithography apparatus and method for controll...

Method for manufacturing semiconductor device and exposure system

Etching apparatus and etching method

Patents Applicationslast 30 patents

METHOD OF FORMING PATTERN AND LAMINATE

PATTERN FORMATION METHOD

PATTERN FORMATION METHOD AND POLYMER ALLOY BASE MATERIAL

METHOD OF FORMING PATTERN AND LAMINATE

METHOD OF FORMING PATTERN

PATTERN FORMATION METHOD, PATTERN FORMATION SYSTEM, AND METHOD FOR...

PATTERN TRANSFER METHOD

METHOD FOR EVALUATING LITHOGRAPHY APPARATUS AND METHOD FOR CONTROLL...

System for adjusting manufacturing equipment, method for adjusting...

Method for manufacturing semiconductor device and exposure system

Etching apparatus and etching method