Masahiro Koyama

Follow

Person

Tsuchiura, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Linear motor, movable stage and electron microscope
- Patent number 9,093,890
- Issue date Jul 28, 2015
- Hitachi High-Technologies Corporation
- Hideki Tanaka
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage device
- Patent number 8,823,309
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen stage apparatus and specimen stage positioning control method
- Patent number 8,076,651
- Issue date Dec 13, 2011
- Hitachi High-Technologies Corporation
- Masahiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspecting system using electron beam and inspecting method using same
- Patent number 6,486,472
- Issue date Nov 26, 2002
- Hitachi, Ltd.
- Yasuhiro Gunji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140042338
- Publication date Feb 13, 2014
- Hitachi High-Technologies Corporation
- Nobuo Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE
- Publication number 20120305766
- Publication date Dec 6, 2012
- Hitachi High-Technologies Corporation
- Hideki TANAKA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Stage Device
- Publication number 20120145920
- Publication date Jun 14, 2012
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD
- Publication number 20090250625
- Publication date Oct 8, 2009
- Masahiro KOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTING SYSTEM USING ELECTRON BEAM AND INSPECTING METHOD USING SAME
- Publication number 20020117619
- Publication date Aug 29, 2002
- Yasuhiro Gunji
- H01 - BASIC ELECTRIC ELEMENTS