-
-
Vacuum pump
-
Patent number 5,664,935
-
Issue date Sep 9, 1997
-
Hitachi, Ltd.
-
Akira Nishiuchi
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
Turbo vacuum pump
-
Patent number 5,536,148
-
Issue date Jul 16, 1996
-
Hitachi, Ltd.
-
Akira Nishiuchi
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
Turbo vacuum pump
-
Patent number 5,451,147
-
Issue date Sep 19, 1995
-
Hitachi, Ltd.
-
Seiji Sakagami
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
Vacuum pump
-
Patent number 5,190,438
-
Issue date Mar 2, 1993
-
Hitachi, Ltd.
-
Minoru Taniyama
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
-
Turbo vacuum pump
-
Patent number 5,020,969
-
Issue date Jun 4, 1991
-
Hitachi, Ltd.
-
Masahiro Mase
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
Vacuum pump
-
Patent number 4,904,155
-
Issue date Feb 27, 1990
-
Hitachi, Ltd.
-
Takashi Nagaoka
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
-
Turbo molecular pump
-
Patent number 4,735,550
-
Issue date Apr 5, 1988
-
Hitachi, Ltd.
-
Takeshi Okawada
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
-
Vacuum pump
-
Patent number 4,668,160
-
Issue date May 26, 1987
-
Hitachi, Ltd.
-
Masahiro Mase
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
Cryogenic liquefied pump system
-
Patent number 4,593,835
-
Issue date Jun 10, 1986
-
Hitachi, Ltd.
-
Seiichi Kikkawa
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...