Masahiro Mimasaka

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Developing apparatus, developing method and substrate processing ap...
- Patent number 6,089,762
- Issue date Jul 18, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for supplying developing solution onto subs...
- Patent number 6,076,979
- Issue date Jun 20, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating solution applying method and apparatus
- Patent number 5,989,632
- Issue date Nov 23, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus and developing method
- Patent number 5,984,540
- Issue date Nov 16, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spin coating apparatus
- Patent number 5,865,893
- Issue date Feb 2, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Minobu Matsunaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for treating a wafer surface
- Patent number 5,020,200
- Issue date Jun 4, 1991
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting an end point of surface treatment
- Patent number 4,998,021
- Issue date Mar 5, 1991
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- B24 - GRINDING POLISHING

Masahiro Mimasaka

Person

Patents Grantslast 30 patents

Developing apparatus, developing method and substrate processing ap...

Method of and apparatus for supplying developing solution onto subs...

Coating solution applying method and apparatus

Developing apparatus and developing method

Spin coating apparatus

Apparatus for treating a wafer surface

Method of detecting an end point of surface treatment