Masahiro MIYAGI

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing fluid supply device, substrate processing device, proces...
- Patent number 10,761,422
- Issue date Sep 1, 2020
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,629,459
- Issue date Apr 21, 2020
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 10,468,273
- Issue date Nov 5, 2019
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing fluid supply device, substrate processing device, proces...
- Patent number 10,133,173
- Issue date Nov 20, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,997,378
- Issue date Jun 12, 2018
- SCREEN Holdings Co., Ltd.
- Hirofumi Masuhara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,972,515
- Issue date May 15, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,852,931
- Issue date Dec 26, 2017
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,713,822
- Issue date Jul 25, 2017
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,640,382
- Issue date May 2, 2017
- SCREEN Holdings Co., Ltd.
- Hirofumi Masuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,601,357
- Issue date Mar 21, 2017
- SCREEN Holdings Co., Ltd.
- Koji Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,576,808
- Issue date Feb 21, 2017
- SCREEN Holdings Co., Ltd.
- Hirofumi Masuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,396,974
- Issue date Jul 19, 2016
- SCREEN Holdings Co., Ltd.
- Hiroaki Takahashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,165,798
- Issue date Oct 20, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,142,433
- Issue date Sep 22, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,883,030
- Issue date Nov 11, 2014
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,815,048
- Issue date Aug 26, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 7,958,899
- Issue date Jun 14, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Takayoshi Tanaka
- B08 - CLEANING
Information Patent Grant
Plating apparatus, plating cup and cathode ring
- Patent number 7,169,269
- Issue date Jan 30, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of cleaning substrate
- Patent number 5,975,098
- Issue date Nov 2, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Mitsuaki Yoshitani
- B08 - CLEANING
Information Patent Grant
Ultraviolet irradiator for substrate, substrate treatment system, a...
- Patent number 5,763,892
- Issue date Jun 9, 1998
- Dainippon Screen Manufacturing Company, Ltd.
- Koji Kizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING GROUP III-NITRIDE SEMICONDUCTOR
- Publication number 20240266168
- Publication date Aug 8, 2024
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20200035518
- Publication date Jan 30, 2020
- SCREEN Holdings Co., Ltd.
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...
- Publication number 20180292746
- Publication date Oct 11, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro MIYAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180082860
- Publication date Mar 22, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20180082859
- Publication date Mar 22, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170117163
- Publication date Apr 27, 2017
- SCREEN HOLDINGS CO., LTD.
- Hirofumi MASUHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160005592
- Publication date Jan 7, 2016
- SCREEN Holdings Co., Ltd.
- Hirofumi MASUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...
- Publication number 20150264790
- Publication date Sep 17, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090694
- Publication date Apr 2, 2015
- Koji Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150059645
- Publication date Mar 5, 2015
- SCREEN Holdings Co. Ltd.
- Masahiro MIYAGI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140352742
- Publication date Dec 4, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140202496
- Publication date Jul 24, 2014
- Dainippon Screen Mfg., Co., Ltd.
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130260570
- Publication date Oct 3, 2013
- DAINIPPON SCREEN MFG. CO., LTD.
- Hirofumi MASUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130260574
- Publication date Oct 3, 2013
- DAINIPPON SCREEN MFG. CO., LTD.
- Hirofumi MASUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130084709
- Publication date Apr 4, 2013
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130084710
- Publication date Apr 4, 2013
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130078381
- Publication date Mar 28, 2013
- Masahiro MIYAGI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20120090649
- Publication date Apr 19, 2012
- Hiroaki TAKAHASHI
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20090050175
- Publication date Feb 26, 2009
- Takayoshi Tanaka
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080178917
- Publication date Jul 31, 2008
- Masahiro Miyagi
- B08 - CLEANING
Information Patent Application
TWO-FLUID NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PRO...
- Publication number 20080173327
- Publication date Jul 24, 2008
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080070418
- Publication date Mar 20, 2008
- Masahiro Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20080006302
- Publication date Jan 10, 2008
- Hiroyuki Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20070272545
- Publication date Nov 29, 2007
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070218656
- Publication date Sep 20, 2007
- Masahiro MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING APPARATUS, PLATING CUP AND CATHODE RING
- Publication number 20070080057
- Publication date Apr 12, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS, PLATING CUP AND CATHODE RING
- Publication number 20070023277
- Publication date Feb 1, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating apparatus, plating cup and cathode ring
- Publication number 20040140199
- Publication date Jul 22, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Masahiro MIYAGI

Person

Patents Grantslast 30 patents

Processing fluid supply device, substrate processing device, proces...

Substrate processing apparatus

Substrate processing method

Processing fluid supply device, substrate processing device, proces...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing device and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate cleaning apparatus and substrate cleaning method

Plating apparatus, plating cup and cathode ring

Apparatus for and method of cleaning substrate

Ultraviolet irradiator for substrate, substrate treatment system, a...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING GROUP III-NITRIDE SEMICONDUCTOR

SUBSTRATE PROCESSING METHOD

PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TWO-FLUID NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PRO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PLATING APPARATUS, PLATING CUP AND CATHODE RING

PLATING APPARATUS, PLATING CUP AND CATHODE RING

Plating apparatus, plating cup and cathode ring